基于光学和扫描显微平台的微尺度实验力学检测技术和装置研究

本文基于光学和扫描显微平台,介绍了本研究组在微尺度实验力学检测技术和设备方面的最新研究成果。在检测技术方面涉及显微散斑干涉技术、微标记阵列检测技术、晶粒变形分析技术、光学探针动静态变形分析技术;在检测系统和装置方面介绍了新近开发的双视场薄膜检测系统、散斑微干涉系统、微标记检测平台、AFM和SEM单轴拉伸装置、三维微定位与加载系统、微力传感器及其标定装置、微动平台驱动装置等。探讨了微尺度实验力学检测中的问题和新的检测技术,给出了一些典型的应用和相关装置。

Measurement of Micro-scale Experimental Mechanics Based on Stage of Optical and Scanning Microscopes

The paper presents an overview of the new micro-scale experimental mechanics concepts,methods and devices of optical and scanning microscopic stages developed at photomechanical laboratory of Tsinghua University.The research includes micro speckle interferometry,micro marker method,optical probe method,grain deformation and movement analysis.In particular,it also describes several devices and measurement systems developed in our group,which are double-field-of-view speckle interferometer for thin film tensile test,microscopic speckle interferometry which enables an alternative usage of conventional specular interferometry(CSI),ESPI,TSIP and phase shifting for micro-object shape,in-plane and out-of-plane displacement measurements,micro marker measuring stage for local zone deformation measurement,uniaxial tensile setups using in AFM and SEM measuring stages for micro-objects and thin films testing and other instruments for micro-objects testing,such as positioning and loading system,micro force sensor and programmable driving systems of translation platform and displacement sensor.To prove the applicability of these methods and devices,some applications of measurement examples are given and the problems and further research on micro-scale experimental mechanics are discussed.