变线距全息光栅的在线检测

变线距平面光栅单色仪具有自动聚焦、消慧差、分辨率高以及装置简单等特点,在同步辐射装置、激光核聚变装置上有着广阔的应用前景。变线距平面光栅的全息制作越来越受到人们的关注,但变线距光栅的全息制作必需有高精度的密度检测技术,尤其是需要在线检测技术相配合。文中应用干涉云纹法和条纹图像处理技术,对全息光栅制作过程中的光栅线密度进行了在线检测,并给出了检测原理。讨论了变线距光栅线密度的表述,推导出了检测变线距光栅线密度的相关公式,介绍了变线距光栅线密度的在线检测原理以及干涉条纹图的处理方法。

On-line Detection of Varied-line-space holographic Grating

Owing to its ability of focusing automatically, eliminating aberration, high resolution and easy equipment, the varied line space (VLS) grating has significant application in synchrotron radiation devices, laser fusion equipment etc. The fabrication of VLS grating holographic record has been paid more and more attention. Quality control is a key factor. It requires high accurate measurement techniques, especially on-line measurement techniques. In this paper, the morie interferometry method and fringe image process technique are used to on-line detection of VLS grating line density during the fabrication, and the detection method and relative technique are discussed.The expression of a grating line density was discussed. The relevant formulas used to detection of VLS grating line density were deduced. The on-line detecting principle of VLS grating line density and image processing method of the interference fringes were introduced.