| 一种新型微梁阵列传感器设计及实现 |
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| 引用本文： | 薛长国,张广平,张青川,伍小平.一种新型微梁阵列传感器设计及实现[J].实验力学,2011,26(1):21-25. |
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| 作者姓名： | 薛长国 张广平 张青川 伍小平 |
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| 作者单位： | 中国科学技术大学中科院材料力学行为和设计重点实验室,合肥,230027 |
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| 基金项目： | 国家自然科学基金(批准号：10627201、10732080、10472112和20674078)资助的课题 |
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| 摘 要： | 微悬臂梁传感技术是微纳传感技术研究的热点,仪器装置的研究也从单悬臂梁向微梁阵列的方向发展.本文针对间距为250μm的商品化微梁阵列,提出了一种实现对其弯曲变形的读出系统光路.利用高精度位移平台调节激光器空间位置,使光束实现微距离上平行,并分别照射在阵列梁的相邻微梁上.用位置敏感探测器对两个微悬臂梁尖端反射的激光信号进行...
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| 关 键 词： | 微机电系统 微悬臂梁阵列 生化传感器 设计与实现 |
| 收稿时间： | 7/7/2010 12:00:00 AM |
Design and Realization of New Optical Sequential Readout for Micro-cantilever Array |
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| XUE Chang-guo,ZHANG Guang-ping,ZHANG Qing-chuan and WU Xiao-ping.Design and Realization of New Optical Sequential Readout for Micro-cantilever Array[J].Journal of Experimental Mechanics,2011,26(1):21-25. |
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| Authors: | XUE Chang-guo ZHANG Guang-ping ZHANG Qing-chuan and WU Xiao-ping |
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| Institution: | Key Laboratory of Mechanical Behavior and Design of Material of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027, China;Key Laboratory of Mechanical Behavior and Design of Material of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027, China;Key Laboratory of Mechanical Behavior and Design of Material of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027, China;Key Laboratory of Mechanical Behavior and Design of Material of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027, China |
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| Abstract: | |
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| Keywords: | MEMS micro-cantilever array biosensor design and realization |
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