VIBRATION OF CANTILEVERS WITH ROUGH SURFACES |
| |
| Authors: | Huiling Duan Yahui Xue Xin Yi |
| |
| Institution: | [1]State Key Laboratory for Turbulence and Complex System, CAPT, Department of Mechanics and Aerospace Engineering, College of Engineering, Peking University, Beijing 100871, China [2]Division of Engineering, Brown University, Providence, RI 02912, USA |
| |
| Abstract: | We study the effect of surface roughness on the resonance frequency of micro-cantilever sensors.The analysis demonstrates that surface roughness can enhance,decrease or even annul the effect of surface stress on the resonance frequency,depending on the surface inclination angle and the Poisson ratio of the coating film on the cantilever. |
| |
| Keywords: | surface roughness surface stress resonance frequency micro-cantilevers |
| 本文献已被 CNKI 维普 万方数据 ScienceDirect 等数据库收录！ |
|
