| 屈曲型数字微镜结构的机电动力学分析 |
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| 引用本文： | 贾建援,范国滨,陈贵敏.屈曲型数字微镜结构的机电动力学分析[J].应用力学学报,2003,20(2):92-95. |
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| 作者姓名： | 贾建援 范国滨 陈贵敏 |
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| 作者单位： | 西安电子科技大学,西安,710071 |
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| 基金项目： | 陕西省自然科学基金资助 ( 99C0 5 ) |
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| 摘 要： | 设计一种基于压杆屈曲原理的数字微镜装置，针对该装置建立机电动力学模型，应用龙格-库塔法和有限元数值方法求解其动力学模型中的隐函数。通过对该模型的完整机电动力学微分方程数值求解所作的运动仿真，得到了微镜基板的连续角位移曲线，表明该装置具有良好的光束稳定特性。
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| 关 键 词： | 屈曲型数字微镜结构 压杆屈曲原理 机电动力学模型 数值仿真 连续角位移曲线 光束稳定性 |
| 文章编号： | 1000-4939(2003)02-0092-04 |
| 修稿时间： | 2002年5月9日 |
Electromechanical Dynamics Analysis of Buckling Microstructrue for Micromirror |
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| Jia Jianyuan,Fan Guobin,Chen Guimin.Electromechanical Dynamics Analysis of Buckling Microstructrue for Micromirror[J].Chinese Journal of Applied Mechanics,2003,20(2):92-95. |
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| Authors: | Jia Jianyuan Fan Guobin Chen Guimin |
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| Abstract: | A microstructure of digital micromirror device based on buckling theory is designed and its electromechanical dynamics model is established. The hidden functions in the dynamics model are found out by using numerical methods such as Runge Kutta method and Finite Element method. A numerical simulation to the whole motion differential equation is finished, and a continuous angular displacement curve of micro reflectmirror is obtained. It is concluded that the buckling microstructures has an advantage of light beam stability. |
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| Keywords: | buckling microstructure electromechanical dynamics digital micromirror devices |
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