微观摩擦学研究进展

早在十九世纪中叶就有人试图从原子、分子水平上揭示摩擦过程的本质，然而直到原子力显微镜和摩擦力显微镜问世之后的本世纪八十年代，学术界才明确提出了微观摩擦学这个概念。为了推动微观摩擦学的发展，对微观摩擦学的研究方法及其最新研究进展作了综合介绍与评述。微观摩擦学在基础研究方面首先是从边界润滑之研究提出的，而在应用方面则是从磁头－盘之润滑提出的；在研究方法上主要是原子力显微镜、ＬＢ膜技术、表面力装置、石英晶体微量天平、红外、电子能谱和计算机分子动力学模拟等。目前，微观摩擦学主要应用于高密度磁纪录介质的摩擦学研究，同时还应用于微型机械和大规模集成电路的制造，以及微观摩擦、粘着与磨损行为的基础研究等方面，除此以外，还简明地指出了今后微观摩擦学研究应当重视的若干问题。

Advancing in Microtribology Research

Early in the 19th century, the characters of friction process on atomic or molecularlevel had been studied. However, the concept of microtribology was proposed until 1980's whenatomic force microscope (AFM) and frictional force microscope (FFM) came out. To develop themicrotribology research, researching advances and the research methods were reviewed. On thebasic research, it was proposed for boundary lubrication; on the application research, it wasproposed for the lubrication of magnetic headerdisk system. The research methods include AFM,FFM , LB technique , surface force apparatus , quartz crystal microbalance , IR , XPS and moleculardynamic simulation, etc. It was mainly applied in tribology of high density magnetiy recordingsystem, micromachine, manufacture of integrated circuit (IC) , microfriction, microwear andmicroadherence etc. In addition, some problems to which should be pay attention in future ofmicrotribology research were point out.