Cr/Ag纳米多层薄膜膜-基结合强度及摩擦学性能研究

采用中频磁控溅射技术在AISI 440C钢表面制备了不同调制周期的Cr/Ag纳米多层薄膜.通过X射线衍射仪（XRD）及高分辨透射电子显微镜（HRTEM）分析表征了纳米多层薄膜的微观组织结构,通过划痕试验机与真空球-盘摩擦试验机分别测试了纳米多层薄膜膜-基结合强度及真空摩擦学性能,并与纯Ag薄膜及Cr/Ag双层薄膜进行了对比.结果表明：纳米多层结构可以显著提高Ag基固体润滑薄膜膜-基结合强度,Cr/Ag纳米多层薄膜在较高转速及载荷条件下表现出明显优于纯Ag及Cr/Ag双层薄膜的摩擦学性能.Cr薄膜层与钢基体表面良好结合以及纳米多层薄膜内良好的层间结合性能是纳米多层薄膜膜-基结合强度提高的主要原因.

Adhesion Strength and Tribological Properties of Cr/Ag Nanoscaled Multilayer Films

The Cr/Ag nanoscaled multilayer films with different modulation periods were deposited by magnetron sputtering. The microstructure and composition of these films were analyzed using X-ray diffraction and high resolution transmission electron microscopy. The adhesive strength of the coating/substrate system and the tribological performance of Cr/Ag nanoscaled multilayer films, Cr/Ag double layer film and pure Ag film were comparatively studied using scratch tester and ball-on-disc tribometer in vacuum. The results indicate that the introduction of Cr layers can improve the adhesive strength of the coating/substrate system. Moreover, the interfaces with "accordant" crystal structure were prone to be formed between the Cr layer and Ag layer because of the very similarity of the lattice parameters of the Cr and Ag. Accordingly, the adhesive strength between the layers in multilayer films was also improved. As a result, the Cr/Ag nanoscale multilayer films showed better tribological performance than the pure Ag film and Cr/Ag double layer film under relatively high sliding speed and heave load conditions.