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MoS2/WS2共溅射复合薄膜的微结构及其摩擦磨损性能研究
引用本文:尹桂林,黄平华,余震,何丹农,涂江平.MoS2/WS2共溅射复合薄膜的微结构及其摩擦磨损性能研究[J].摩擦学学报,2007,27(1):41-44.
作者姓名:尹桂林  黄平华  余震  何丹农  涂江平
作者单位:1. 上海交通大学,材料科学与工程学院,上海,200030
2. 浙江大学,材料科学与工程系,浙江,杭州,310027
基金项目:国家重点基础研究发展计划(973计划),国家自然科学基金
摘    要:采用磁控溅射共溅射法制备MoS2/WS2复合润滑薄膜,利用X射线衍射仪、X射线能谱仪及透射电子显微镜对薄膜的成分和结构进行分析,采用UMT-2MT型微摩擦磨损试验机在大气(相对湿度45%~50%)和室温(20~25 ℃)环境下评价薄膜的摩擦磨损性能.结果表明,MoS2/WS2复合薄膜结构致密,具有较好抗氧化性,其耐磨寿命、摩擦稳定性和抗载荷能力比MoS2磁控溅射薄膜均有显著提高,而摩擦系数更低.

关 键 词:磁控溅射  摩擦磨损性能
文章编号:1004-0595(2007)01-0041-04
修稿时间:2006-02-13

Microstructure and Tribological Properties of Co-sputtered MoS2/WS2 Composite Films
YIN Gui-lin,HUANG Ping-hu,YU Zhen,HE Dan-nong,TU Jiang-ping.Microstructure and Tribological Properties of Co-sputtered MoS2/WS2 Composite Films[J].Tribology,2007,27(1):41-44.
Authors:YIN Gui-lin  HUANG Ping-hu  YU Zhen  HE Dan-nong  TU Jiang-ping
Institution:1. College of Materials Science and Engineering, Shanghai Jiaotong University, Shanghai 200030, China; 2. Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
Abstract:MoS_2/WS_2 composite lubricating film was prepared by magnetron co-sputtering method.X-ray diffraction,energy dispersive X-ray detector and transmission electron microscopy were used to analyze the composition and microstructure of the films.The friction and wear behavior was performed on a reciprocating pin-on-disk tribometer at room temperature in air(RH=45%~50%).The composite film had a compact microstructure and therefore it improved oxidation resistance.As compared with pure MoS_2 film,the MoS_2/WS_2 composite film exhibited improved friction stability,wear durability and load-carrying capacity,and the composite film also revealed much lower friction coefficient.
Keywords:MoS2  WS2
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