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| 添加TiN对MoS2基复合薄膜结构和性能的影响 | |
| 引用本文： | 李倩倩,尹桂林,郑慈航,余震,何丹农.添加TiN对MoS2基复合薄膜结构和性能的影响[J].摩擦学学报,2011,31(1):40-44. |
| 作者姓名： | 李倩倩 尹桂林 郑慈航 余震 何丹农 |
| 作者单位： | 1. 上海交通大学,材料科学与工程学院,上海,200240;纳米技术及应用国家工程研究中心,上海,200241 2. 纳米技术及应用国家工程研究中心,上海,200241 3. 上海交通大学,材料科学与工程学院,上海,200240 |
| 基金项目： | 国家自然科学基金项目（50675131） |
| 摘 要： | 通过磁控反应溅射方法制备MoSx-TiN复合薄膜，研究添加少量TiN对MoS2基薄膜结构和性能的影响。薄膜的结构和性能通过X射线光电子能谱仪（XPS）、X射线衍射仪（XRD）、场发射扫描电子显微镜（FESEM）及UMT-2多功能微摩擦磨损试验机等进行了表征。结果表明：与纯MoS2薄膜相比，少量TiN的添加使得MoSx-TiN复合薄膜（002）晶面择优取向且结构致密。与纯MoS2和MoS2-Ti薄膜相比，MoSx-TiN复合薄膜在潮湿大气条件下具有更优异的摩擦磨损性能，更低的摩擦系数。 |
| 关 键 词： | MoS2 TiN 磁控反应溅射 摩擦磨损性能 |
| 收稿时间： | 5/4/2010 12:00:00 AM |
| 修稿时间： | 7/2/2010 12:00:00 AM |
Effect of TiN Addition on the Microstructure and Performance of MoS2-based Composite Films |
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| LI Qian-qian,YIN Gui-lin,ZHENG Ci-hang,YU Zhen and HE Dan-nong.Effect of TiN Addition on the Microstructure and Performance of MoS2-based Composite Films[J].Tribology,2011,31(1):40-44. | |
| Authors: | LI Qian-qian YIN Gui-lin ZHENG Ci-hang YU Zhen and HE Dan-nong |
| Institution: | LI Qian-qian1,2,YIN Gui-lin2,ZHENG Ci-hang1,YU Zhen1,HE Dan-nong1,2(1.College of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China2.National Engineering Research Center of Nanotechnology,Shanghai 200241,China) |
| Abstract: | MoSx-TiN composite films were prepared by magnetron reaction-sputtering. The effect of small amount of TiN on the microstructure and performance of MoS2 -based film was studied. The structure and properties of films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and UMT-2 multi-functional tribometer. Experimental results indicated that, compared with pure MoS2 film, MoSx-TiN composite film had a stronger preferential orientation of crystal plane (002) and a compact microstructure. The MoSx-TiN composite film exhibited better tribological properties than that of pure MoS2 and MoS2-Ti films in humid air at room temperature. |
| Keywords: | MoS2 TiN magnetron reaction-sputtering tribological property |
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