磁控溅射和脉冲直流化学气相沉积Ti-Si-N薄膜摩擦磨损性能对比研究

分别利用磁控溅射和脉冲直流化学气相沉积(PCVD)技术制备了Ti-Si-N薄膜，测定了2种Ti-Si-N薄膜的显微硬度，并采用球一盘式高温摩擦磨损试验机对比考察了其高温摩擦磨损性能．结果表明，当薄膜中Si含量(原子分数)约为10％时，2种薄膜的显微硬度达到最大值；2种Ti-Si-N薄膜的耐磨性能同其硬度之间不存在对应关系，其中采用PCVD方法制备的Ti-Si-N薄膜的高温抗磨性能较优；2种薄膜在高温下的摩擦系数均有所降低，这归因子高温下氧化膜的润滑作用。

Comparison of Tribological Behaviors of Ti-Si-N Coatings Prepared by Magnetically Controlled Sputtering and Pulsed Chemical Vapor Deposition

Two types of Ti-Si-N coatings were deposited W18Cr4V high speed steel and 1Cr18Ni9Ti stainless steel, respectively, making use of pulsed chemical vapor deposition (PCVD) and magnetically controlled sputtering, respectively. The resulting coatings were coded as C-type Ti-Si-N coating and P-type Ti-Si-N coating, respectively. The hardness of the coatings was measured, while their friction and wear behaviors sliding against AISI-52100 steel at ambient and elevated temperatures in a ball-on-disc configuration were evaluated on a high temperature friction and wear tester. Moreover, the worn surface morphologies of various coatings at different sliding conditions were observed on a scanning electron microscope. It was found that the coatings had the largest hardness at Si content about 10at%. The wear-resistance of the two types of coatings at room and high temperatures was independent on their hardness. The PCVD Ti-Si-N coating showed better wear-resistance at elevated temperature than the magnetically-controlled-sputtered one. The differences in the tribological behaviors of the two types of Ti-Si-N coatings were attributed to their differences in the film-substrate bonding strengths and hardness, while the decreased friction coefficients of the coatings at elevated temperature than at ambient condition was attributed to the lubricity of the oxide layer on the worn coating surfaces.