Cr靶电流对Cr改性类石墨薄膜摩擦磨损性能的影响

采用闭合场非平衡磁控溅射离子镀设备,在不同Cr靶电流参数下制备Cr改性类石墨薄膜,测试了薄膜的硬度、结合强度、摩擦系数和比磨损率,采用扫描电子显微镜和透射电子显微镜观察薄膜的显微结构.结果表明:改变Cr靶电流不仅能够改变薄膜的化学成分,而且能够改变薄膜的显微结构;随着Cr靶电流增加,薄膜的断口出现纤维状结构,并逐渐发展为柱状结构;Cr的加入使得类石墨薄膜形成周期性层状结构;在干摩擦条件下,随着Cr靶的电流增加,GLC膜的摩擦系数先减小而后增大;当载荷较小时,薄膜的比磨损率随Cr靶电流的增加而增大,载荷较大时薄膜的比磨损率变化不大.化学成分和显微结构的变化引起GLC膜硬度和韧性的变化,从而改变了薄膜的摩擦磨损性能.

Effects of Sputtering Current of Cr on Tribological Properties of Graphite-like Carbon Coating

Graphite-like carbon coating was deposited by closed field unbalanced magnetron sputter ion plating technique with different sputtering current on Cr target. Hardness, adhesion, friction coefficient and specific wear rate of the coating was tested and the microstructure of the coating was observed by SEM and TEM. The results indicate that variation of the sputtering current of Cr not only changed the chemical composition of the coatings but also greatly affected microstructure of the coatings. With increasing Cr current, the cross-section of the coatings developed from fibrous to columnar. The incorporation of Cr led to a periodic muhilayered structure in the graphitelike carbon coatings. Variation of the chemical composition and microstructure induced different tribological properties of the graphite-like carbon coatings.