| 液氮激冷对含氢非晶碳膜性能的影响 |
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| 引用本文： | 王兆龙,薛勇,张斌,高凯雄,强力,牟志星,王凯.液氮激冷对含氢非晶碳膜性能的影响[J].摩擦学学报,2020,40(1):82-88. |
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| 作者姓名： | 王兆龙 薛勇 张斌 高凯雄 强力 牟志星 王凯 |
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| 作者单位： | 1.中国科学院兰州化学物理研究所 固体润滑国家重点实验室，甘肃 兰州 730000 |
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| 基金项目： | 国家自然基金项目(U1737213)和青年创新促进会项目(2017459)资助 |
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| 摘 要： | 采用等离子增强化学气相沉积系统制备了含氢非晶碳膜. 加热到相应温度(200、250、300、350和400 ℃)后，对薄膜进行液氮激冷处理，并研究其结构、机械及摩擦性能的变化. 结果表明:薄膜硬度在200~300 ℃温度下液氮激冷后，其硬度随热处理温度增加，C-C sp2键逐渐增加；在350~400 ℃温度下液氮激冷处理后，薄膜的硬度逐渐减小，薄膜呈石墨化趋势；而其弹性恢复在整个处理过程(200~400 ℃)中随温度升高持续增大，和C-C sp2键变化趋势一致. 液氮激冷处理后，含氢非晶碳膜的摩擦系数及磨损量均得到改善，在300 ℃激冷处理的含氢非晶碳膜具备最低的摩擦系数及磨损量.
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| 关 键 词： | 含氢非晶碳膜 激冷 摩擦 磨损 热稳定性 |
| 收稿时间： | 2019-06-06 |
Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films |
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| Institution: | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Gansu Lanzhou 730000, China2.The Third Filiale of 404 Company Limited, CNNC, Gansu Lanzhou 732850, China3.College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China4.College of Petrochemical Technology, Lanzhou University of Technology, Gansu Lanzhou 730050, China |
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| Abstract: | The hydrogenated amorphous carbon films were deposited by plasma enhanced chemical vapor deposition system. When the films were heated at the objective temperature, the liquid nitrogen was used for shock chilling. The structures, mechanical and frictional performances variation of the hydrogenated amorphous carbon films were investigated. The results suggest that hardness of films gradually increased with liquid nitrogen shock chilling at 200~300 ℃, and decreased liquid nitrogen shock chilling at 350~400 ℃. The elastic recovery and C-C sp2 bond increased in all experiment. The friction coefficients and wear volumes were all reduced after liquid nitrogen shock chilling, particularly under the temperature of 300 ℃ which showed the minimum of friction coefficient and wear volume. |
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