水浴对MoS2薄膜结构及摩擦学性能影响的研究

为考察水介质对二硫化钼(MoS₂)薄膜结构和摩擦学性能的影响，采用沸腾蒸馏水对溅射MoS₂薄膜进行水浴处理，并对水浴处理前后薄膜的微观结构、摩擦学性能进行了研究. 研究发现，薄膜中同时存在晶体结构和非晶结构. 随着水浴处理时间的延长，XRD分析结果中观察到薄膜中非晶相减少，微晶相增加，同时晶粒尺寸先减小后增大. 另外，薄膜的枝状晶上产生了更多的细小枝状晶. 薄膜中的残余应力也随水浴时间延长而发生明显变化. 薄膜的摩擦学性能受到水浴的明显影响，当水浴处理时间为20 min时，MoS₂薄膜的耐磨寿命达到未水浴处理薄膜的约2倍. 分析认为，水浴处理导致溅射MoS₂薄膜内应力、组织结构和晶体结构的变化，引起了其摩擦学性能的变化. 

Structure and Tribological Behaviors of MoS2 Films Treated by Water Bath

In order to investigate the effect of aqueous medium treatment on the structure and tribological properties of molybdenum disulfide (MoS₂) film, the sputtered MoS₂ film was treated by boiling water. A series of studies on the microstructure, tribology properties of the films before and after water bath were carried out. It was found that the longer the water bath time, the less amorphous, the more microcrystals. Additionally, the grain size decreased firstly and then increased. The film produced small dendrites on the big dendrites after being treated by water bath, and the treatment increased the density and wear life. The stress in the MoS₂ film also increased firstly and then decreased along with the boiling time. When the film was kept in the water bath for 20 minutes, the wear life was twice as that of the untreated MoS₂ film. As a consequence, the water bath treatment caused a change in the stress of the sputtered MoS₂ film. The wear behavior was discussed on basis of film microstructure.