偏压及测试环境对离子束DLC膜摩擦学行为的影响

采用线性阳极层离子束技术制备了类金刚石薄膜(DLC膜),研究了不同衬底负偏压和测试环境对DLC薄膜摩擦学性能的影响.结果表明:在-50V偏压下,薄膜硬度和弹性模量最大,这主要与薄膜中高的sp³含量相关;衬底负偏压对薄膜在室温大气条件下的摩擦学性能影响不显著,薄膜总体呈现较低的摩擦系数和磨损率,显示出优异的抗磨损性能;线性离子束制备的含氢DLC薄膜的摩擦学行为受湿度及环境气氛影响较大,归因于环境中的氧气和水分造成的摩擦化学反应.

Effect of Bias and Environment on the Tribological Behavior of Diamond-like Carbon Films by Linear Ion Source

Diamond-like carbon films were deposited on p-Si(100) substrates by a linear anode layer ion beam system using the precursor gas of methane. Effects of the substrate negative bias and the testing environment on the tribological behaviors of the films were considered. Results show that hardness and elastic modulus reached their maximum at the substrate bias of -50 V. When testing in ambient air, films prepared at various substrate bias exhibited good anti-wear property, and there was no significant difference between their tribological behaviors. Also, friction coefficients were very sensitive to the testing environment, mainly as a result of the tribochemical reaction at the tribological interface.