用等离子体增强化学气相沉积技术制备类金刚石碳薄膜的摩擦磨损性能研究

利用射频-直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积类金刚石碳薄膜,采用激光拉曼光谱仪和原子力显微镜对薄膜的结构和表面形貌进行表征,采用纳米压痕仪测定薄膜的硬度,并用UMT型微摩擦磨损试验机考察了薄膜在不同试验条件下的摩擦磨损性能.结果表明:所制备的类金刚石碳薄膜表面光滑致密且硬度较高;在干摩擦条件下与GCr15钢球或Al2O3球配副时显示出良好的减摩抗磨性能,摩擦系数较低,耐磨寿命较长,而在水润滑条件下同Al2O3球配副时发生灾难性磨损.

Friction and Wear Behavior of Diamond-Like Carbon Film Prepared by Plasma Enhanced Chemical Vapor Deposition

Diamond-like carbon films were prepared on single crystal silicon substrate using direct current radio frequency plasma enhanced chemical vapor deposition (DC-RFPECVD). The structure and morphology of the films were analyzed by means of Raman spectroscopy and atomic force microscopy. The hardness of the film was determined using a nano-indenter. The friction and wear behaviors of the DLC film sliding against Al_2O_3 ball or GCr15 steel ball under dry- and water-lubricated conditions were evaluated using a UMT test rig. The morphology of the wear scar of the counterpart steel ball was observed sing a scanning electron microscope. It was found that the diamond-like carbon film formed on the Si surface was smooth and compact. The DLC film showed good friction-reducing and antiwear behavior as it slid against the ceramic and steel counterparts under unlubricated condition, which was ascribed to the graphitization of the DLC film and the formation of a DLC transferred layer on the counterpart surface. However, the DLC film showed poor friction-reducing and antiwear ability as it slid against the ceramic under water-lubricated condition. This was because water as the lubricant acted to restrain the graphitization of the DLC film and the formation of its transferred layer on the counterpart surface.