硅微机械谐振陀螺仪的非线性分析

给出了硅微机械谐振陀螺仪的结构,介绍了硅微机械谐振陀螺仪的工作原理,详细推导并给出了陀螺仪的输出频率和标度因数非线性的计算公式;基于影响谐振陀螺仪标度因数的参数,分析了由谐振器的振幅和梳齿静电驱动力引起的硅微机械谐振陀螺仪的非线性特性,给出了振动幅度与谐振频率关系的表达式.实验结果表明,陀螺仪的整体性能主要取决于谐振器振动幅度的稳定性.

Nonlinear analysis on silicon micromachined resonant gyroscope

The operating principle of a silicon micro-machined resonant gyroscope was introduced and its structure was given.The output frequency of the gyroscope and the calculation expressions of scale factor nonlinearity were deduced.Based on the parameters that may influence the scale factor of the resonant gyroscope,the nonlinearity characteristic,which was caused by the resonator amplitude and electrostatic comb-finger driving-force,was analyzed.Finally,the relationship between the resonance frequency and vibration amplitude was presented.The results indicated that the performance of the silicon micromachined resonant gyroscope was determined by the stabilization of the vibration amplitude of resonator.