环形陀螺敏感结构的平面振动分析

在薄壁圆环振动特性基础上,研究了振动环式微机械陀螺的支撑梁对环的振动模态及自然频率的影响。对一种外支撑式环形微机械陀螺敏感结构进行了ANSYS模态仿真,得到工作振动模态的变形量。以薄壁环2节点变形模态函数为参考函数对仿真变形量用最小二乘法拟合,拟合误差在4.5%以内,各函数系数一致性误差小于1.5%。基于支撑梁对环结构的模态函数影响较小的条件,用能量法和速度积分法得到结构的应变能和动能函数,进一步得到具有支撑梁环结构自然频率的近似解。选取4组支撑梁尺寸,其近似解与仿真结果的相对误差在±3%以内。

In-plane vibration analysis of a ring gyroscope

The suspension impact on the vibration mode and natural frequency of MEMS ring gyroscope is investigated based on the thin ring’s vibration characteristics.Focused on an outside-suspension structure,the ANSYS mode simulation is processed to obtain the operational modes deformation.These data are fitted by least-squares procedure based on the 2-node-flexual mode function of thin-ring.All the relative fitting errors are less than 4.5%,and the relative coefficient consistence errors of fitting functions are within 1.5%.Given the little suspension effect on ring’s mode function,the suspension strain and kinetic energy equations are presented by energy theory and velocity integral method.Based on these,the natural frequency of four gyroscope structures with different sizes suspensions are acquired,and the relative error between theoretic solution and simulation data is no more than 3%.