模糊控制在静电悬浮转子微陀螺起支中的应用

给出了一种基于UV-LIGA技术的静电悬浮转子微陀螺，提出了控制系统组成方案，为了实现转子的起支控制和稳定悬浮，模糊控制被应用于该系统中，首先，对轴向压膜阻尼和滑膜阻尼进行有限元分析，并用解析法进行分析，计算结果表明两种方法的一致性，从而得到阻尼的解析表达式。然后，建立了带偏置电压的双边支承下的数学模型，并对数学模型进行模糊控制仿真研究，仿真结果表明，相对于PID控制，模糊控制具有较强的鲁棒性，具有响应速度快，自适应能力强的优点。最后，设计了悬浮控制系统，给出了硬件和软件组成。

Fuzzy control applied in initial levitation of micromachined ESG

An electrostatically suspended gyroscope based on UV-LIGA fabrication process was introduced. The control system construction was given. In order to realize the initial levitation and stable levitation,the fuzzy control was applied in this system. First,the axial squeeze film damping coefficient was calculated by finite element analysis and deduced by analytical solution. It is indicated that the calculated results have a good agreement with the simulated ones. So the resolution of the damping coefficient is obtained. Then,the mathematics model of the two side bearing with the bias voltage was built. The simulation results indicate that the fuzzy control has the strong robustness,fast response and good adaptability compared with the PID control. Finally,the levitation control system was designed,and the hardware and software construction was given.