高精度单晶硅挠性摆式加速度计组件的工程化实现

针对单晶硅挠性摆式加速度计的高精度工程化应用需求,设计了加速度计组件及温控系统。针对大多数温控系统工作时的瞬时电流较大问题,设计了一种带抽头的加热片,将温控分为粗温控和精温控两个阶段,不同阶段采用不同的加热电阻。测试结果表明,设定目标温度为60℃,当外界环境温度从5℃到55℃变化时,温控系统到温时间小于15 min,控温精度小于±0.1℃,精温控时的最大电流为粗温控时的33.4%。连续15天通电实验表明,该组件的加速度计刻度系数K1稳定性小于10×10~(-6),偏值K0稳定性小于10μg,满足各类高精度、工程化的应用需求。

Engineering realization of high-precision silicon flexure accelerometer triad

In view of the engineering application requirements of high-precision silicon flexure accelerometer,an accelerometer triad and its temperature control system are designed and fulfilled.To solve the problem that most PWM-based temperature control systems have too large instantaneous current,a tapped heater with three electrodes is designed,in which the temperature control process is divided into the coarse temperature controlling phase and the precise one,and the electrodes used in the two phases are different.Measurement results show that,when the target temperature value is set to 60℃,and the surrounding temperature is changed from 5℃ to 55℃,the temperature stable time is less than 15 min,the temperature control precision is within ±0.1 ℃,and the instantaneous current of the precise temperature controlling phase is 33.4％ of the coarse temperature controlling phase.The 15 days continuous experiments show that the K1 is less than 10x 10-6,and the K0 is less than 10μg,meeting the high-precision engineering applications.