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三轴硅微静电加速度计的实验研究
引用本文:王嫘,韩丰田,董景新,刘云峰.三轴硅微静电加速度计的实验研究[J].中国惯性技术学报,2011,19(3):359-363.
作者姓名:王嫘  韩丰田  董景新  刘云峰
作者单位:清华大学精密仪器与机械学系,北京,100084
基金项目:自然科学基金,航空科学基金
摘    要:静电加速度计依靠可控静电力将敏感质量无接触地悬浮在电极腔内,在空间微重力环境下通过降低带宽和量程可以实现极高的分辨率.设计了一种采用玻璃硅-玻璃“三明治”结构、环形敏感质量、体硅加工工艺的三轴硅微静电加速度计,对加速度计的力/力矩平衡回路进行了分析.采用基于DSP的数字控制器,实现了环形敏感质量的五自由度稳定悬浮,在大...

关 键 词:硅微加速度计  静电悬浮  体硅工艺  三轴加速等计

Experiment study of a tri-axis electrostatically suspended micromachined accelerometer
WANG Lei,HAN Feng-tian,DONG Jing-xin,LIU Yun-feng.Experiment study of a tri-axis electrostatically suspended micromachined accelerometer[J].Journal of Chinese Inertial Technology,2011,19(3):359-363.
Authors:WANG Lei  HAN Feng-tian  DONG Jing-xin  LIU Yun-feng
Institution:WANG Lei,HAN Feng-tian,DONG Jing-xin,LIU Yun-feng(Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China)
Abstract:Electrostatically suspended accelerometers could achieve extremely high resolution in micro-gravity measurement with significantly reduced operating bandwidth and range.A tri-axis electrostatically suspended accelerometer is designed with a ring-shaped proof mass,and is realized in a glass-silicon-glass sandwich structure by bulk silicon micromachining.The force balance loop by electrostatic suspension is analyzed,and a DSP-based control scheme is realized to achieve stable levitation of the ring in five de...
Keywords:micromachined accelerometer  electrostatic suspension  bulk micromachining  tri-axis accelerometer  
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