温度、预载电压对MEMS加速度计输出的影响

梳齿式微机械加速度计的微机械结构在工作中受到预载电压、温度等多种因素的影响,输出具有非线性,研究指出这种非线性度和微机械结构的闭环位置相关.为了明确非线性度的来源,将从其系统模型入手分析,给出闭环状态和输出非线性度的定量关系.此外,环境因素也会通过加力电路间接的影响闭环系统的输出造成非线性度,文中将着重研究预载电压对称性和环境温度这两个重要的环境因素通过检测电路影响输出线性度的情况,并给出了实验验证.

Temperature and preload voltage effect on nonlinearity of MEMS accelerometer

As a MEMS sensor working in the closed-loop system, the sensing mass of MEMS sensor can be driven by not only the external acceleration, the preload voltages, but also be affected by temperature. Research have pointed out the static electricity generator was nonlinear in the closed-loop system. Consequently, in order to find out how the nonlinearity is affected by the temperature and preload voltage, the model of the system output will be analyzed. Then we will focus on the quantitative analysis of the relationship between output nonlinearity and environmental factors such as preload voltages and temperature. Finally, the result of experiments will be given to prove these relationships.