闭环硅微加速度计非线性补偿（英文）

为了降低闭环硅微加速度计的非线性,分析了其主要误差源并提出了相应的补偿方法。首先,分析了闭环状态下检测质量块偏离几何中心位置所造成的非线性问题,并确定了电路零位是主要误差源;其次,利用闭环反馈控制进行了非线性的优化分析;最后,提出了非线性补偿的工程调试方法。离心试验结果表明,采用该调试方法可将加速度计的非线性减小一个数量级以上。该结果验证了非线性误差分析和补偿方法的有效性,且适用于同批次加工的其它加速度计。

Nonlinearity compensation of closed-loop micro-silicon accelerometer

In order to decrease the nonlinearity of closed-loop micro-silicon accelerometer, its main error source is analyzed, and the corresponding compensation method is presented. First, the nonlinear problem caused by the proof-mass position’s deviation from the rest position in closed-loop mode is analyzed. Then the nonlinearity optimization is analyzed based on the feedback control theory. Finally, an engineering debugging method is demonstrated to compensate the nonlinearity of the accelerometer. The centrifuge experiment results show that the nonlinearity of the accelerometer can be decreased at least by one order of magnitude after the debugging, which verify the effectiveness of the error source analysis and the nonlinearity compensation method. This method can also be applied to all the accelerometers with the same manufacturing batch.