| 微机械硅陀螺谐振器结构特征频率分析 |
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| 引用本文： | 颜东,高钟毓,姚雅红.微机械硅陀螺谐振器结构特征频率分析[J].中国惯性技术学报,1998(2). |
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| 作者姓名： | 颜东 高钟毓 姚雅红 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 一本文应用Ｒａｙｌｅｉｇｈ方法对微机械硅陀螺谐振器的水平和垂直方向的固有特征频率进行了分析，并应用有限元分析工具进行了检验。
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| 关 键 词： | Rayleigh方法，有限元方法，特征频率，微机械硅陀螺谐振器 |
Eigenfrequency Analysis of the Resonator of a silicon Micromechanical Gyro |
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| Yan Dong,Gao Zhongyu,Yao Yahong.Eigenfrequency Analysis of the Resonator of a silicon Micromechanical Gyro[J].Journal of Chinese Inertial Technology,1998(2). |
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| Authors: | Yan Dong Gao Zhongyu Yao Yahong |
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| Institution: | Tsinghua University |
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| Abstract: | In this paper , Rayleigh method is used to analyse the eigenfrequen- cy of the lateral mode and vertical mode of the resonator of a silicon micromechanical gyro. A new formular of calculating the eigenfrequency is provided which is proved to be very precise by finite element method. |
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| Keywords: | Rayleigh method finite - element method eigenfrequency silicon micromechanical gyro |
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