振动轮式硅微陀螺仪检测轴的闭环特性

研究了振动轮式硅微陀螺仪敏感结构的谐振特性,重点进行了检测轴的闭环控制系统分析和测试。通过对不同气压条件下检测轴谐振特性的研究及驱动轴和检测轴谐振频率匹配的试验,分析了静电力反馈控制系统中的变刚度问题,进行了硅微陀螺仪检测轴的闭环控制系统设计,给出了检测轴闭环控制系统的原理框图和传递函数,同时分析了闭环条件下驱动轴回路和检测轴回路各部分的相位关系以及正交分量的消除方法。试验结果表明闲环控制提高了硅微陀螺仪的精度指标。

Closed-loop characteristics of sense axis of vibratory wheel silicon micromechanical gyroscope

The resonant characteristics of vibratory wheel silicon micromechanical gyroscope was studied,focusing on the analyzing and testing of the sense axis's closed-loop control system.The change of the gyroscope's resonant characteristics under different air pressure was studied and the experiment on the frequency matching of the drive axis and sense axis was carried out.Based on these,the problems of variable stiffness and negative stiffness,which are induced by using electrostatic force to rebalance the Coriolis force,were discussed.The method of closed-loop control of silicon micromechanical gyroscope was designed,and the transfer function and schematics were given.The phase relationship of the closed-loop control system and the way of eliminating the quadrature signal were analyzed.The test results show that the gyroscope performance is improved by using closed-loop control.