| 微电子机械系统中的若干固体力学问题 |
| |
| 引用本文： | 张向军,孟永钢,温诗铸.微电子机械系统中的若干固体力学问题[J].力学与实践,2003,25(2):7-11. |
| |
| 作者姓名： | 张向军 孟永钢 温诗铸 |
| |
| 作者单位： | 清华大学摩擦学国家重点实验室,北京,100084 |
| |
| 基金项目： | 国家自然科学基金重点项目(50135040)资助. |
| |
| 摘 要： | 简述了微电子机械系统若干固体力学问题研究的现状，包括：微构件材料的基本力学性能；微构件的力学分析与计算；微系统的失效分析研究；微系统的驱动等，并阐述了微系统力学问题中涉及的表面效应和尺度效应，提出了微系统多类型力作用，多种因素交叉，多学科耦合，非线性突出的特点和研究方向。
|
| 关 键 词： | 微电子机械系统 固体力学 尺度效应 表面效应 失效分析 研究方向 |
RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS |
| |
| ZHANG Xiangjun MENG Yonggang WEN Shizhu.RESEARCH ON SEVERAL MECHANICAL PROBLEMS IN MICROELECTROMECHANICAL SYSTEMS[J].Mechanics and Engineering,2003,25(2):7-11. |
| |
| Authors: | ZHANG Xiangjun MENG Yonggang WEN Shizhu |
| |
| Abstract: | This paper reviews the state-of-the-art of researches on several solid mechanics problems in Micro-electromechanical Systems (MEMS), including the basic mechanical properties of materials, mechanical analysis of microstructures, failure analysis of microsystems and actuating mechanisms of microsystems. Different kinds of acting forces, multi-factor interactions, multi-disciplinary nature and non-linearity due to the scaling effect and surface effect are emphasized, and the future work in this field is suggested. |
| |
| Keywords: | MEMS solid mechanics scaling effect surface effect |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
