先进微制造力学

元器件小型化带来了功耗低、响应快、比容量大等显著优点，但同时也带来了新的技术挑战和科学问题，需要对微纳尺度下材料的机械物理性能及制造工艺进行深入研究。论文围绕先进微纳米制造技术与微纳米力学的密切关系，首先综述了聚焦离子束、纳米压印、3D打印等微纳米材料与结构的先进制造技术，并着重阐述了先进微纳米制造技术在力学前沿课题研究中的重要作用；另一方面，从方法与原理的角度阐述了力学思想和方法对先进微纳米制造技术的指导与促进作用。最后，还对目前一些先进微纳米制造技术及相关前沿力学问题进行了展望。

Advanced Manufacturing Mechanics on the Micro-/Nanoscale

Miniaturization of components brings significant advantages, such as low power consumption, fast response and large specific capacity, which stimulate a broad spectrum of scientific research and rapid development of micro-/nano-electromechanical systems. However, as the characteristic dimensions of a device go down to microscale and nanoscale, new phenomena and physics emerge. Moreover, traditional manufacturing techniques in general cannot directly scale down. The challenges come from both science and technology: scientifically, new effects such as size effect in deformation modes and multi-field coupling effects must be taken into consideration; technically, higher precision and resolution are generally in contradiction to high efficiency. Therefore, it is necessary to study the mechanical and physical properties of materials at small scales and develop new micro-/nanomanufacturing techniques. The paper focuses on the close relationship between the advanced micro-/nanomanufacturing techniques and micro-/nanomechanics. We first introduce the advanced manufacturing techniques such as focused ion beam, nanoimprint lithography and 3D printing for fabrication of micro-/nanomaterials and micro-/nanostructures, and then emphasize the importance of advanced micro-/nanomanufacturing techniques at the forefront of research on mechanics. Some examples are also given to show the facilitation of advanced micro-/nanomanufacturing techniques through mechanical methods and principles. Finally, a brief summary of the progress and outlook in advanced micro-/nanomanufacturing techniques and the related mechanical problems are given.