| 轴向二极场MWECR－CVD系统等离子体特性的实验研究 |
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| 引用本文： | 叶超,宁兆元,甘肇强.轴向二极场MWECR－CVD系统等离子体特性的实验研究[J].核聚变与等离子体物理,1995(4). |
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| 作者姓名： | 叶超 宁兆元 甘肇强 |
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| 作者单位： | 苏州大学物理系薄膜材料实验室 |
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| 摘 要： | 本实验设计了永磁非对称轴向二极场ＭＷＥＣＲ－ＣＶＤ系统，并对系统的等离子体特性进行了研究，获得了等离子体空间分布的图像以及气压对等离子体参数的影响。
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| 关 键 词： | 永磁轴向二极场，ECR等离子体空间分布，气压影响 |
EXPERIMENTAL INVESTIGATION OF PLASMA CHARACTERISTICS IN AN AXIAL TWO POLE FLELD MWECR-CVD SYSTEM |
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| YE Chao, NIVG Zhaoyuan, GAN Zhaoqiang.EXPERIMENTAL INVESTIGATION OF PLASMA CHARACTERISTICS IN AN AXIAL TWO POLE FLELD MWECR-CVD SYSTEM[J].Nuclear Fusion and Plasma Physics,1995(4). |
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| Authors: | YE Chao NIVG Zhaoyuan GAN Zhaoqiang |
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| Abstract: | A non-symmetrical axial two pole field MWECR-CVD system with permanent magnets is developed. The plasma characteristics in the system have been investigated experimentally. The spatial profiles of plasma parameters and the effect of pressure on plasma characteristics are presented. |
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| Keywords: | Permanent magnet axial two pole field ECR plasma Spatial profile Pressure effect |
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