| 新型大面积电磁表面波等离子体源 |
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| 引用本文： | 吴丛凤,朱晓东.新型大面积电磁表面波等离子体源[J].核聚变与等离子体物理,1999,19(2):101-104. |
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| 作者姓名： | 吴丛凤 朱晓东 |
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| 作者单位： | 中国科技大学近代物理系，中国科技大学高等研究院 |
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| 摘 要： | 研制了一种新型电磁一面波等离子体源，并对其参数和特性进行了实验研究。实验结果表明，该源在２３０Ｐａ以下的气压范围内成功地产生了直径在１６０ｍｍ以上，电子密度达１０＾１０－１０＾１１ｃｍ＾－３、电子温度只有几电子伏特的大面积均匀等离子体柱，适合于大面积，大体的等离子体应用。
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| 关 键 词： | 电子温度 电磁表面波 等离子体源 |
A NEW TYPE LARGE AREA PLASMA SOURCE PRODUCED BY ELECTROMAGNETIC SURFACE WAVES |
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| WU Congfeng , ZHU Xiaodong WU Shuai ZHAN Rujuan.A NEW TYPE LARGE AREA PLASMA SOURCE PRODUCED BY ELECTROMAGNETIC SURFACE WAVES[J].Nuclear Fusion and Plasma Physics,1999,19(2):101-104. |
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| Authors: | WU Congfeng ZHU Xiaodong WU Shuai ZHAN Rujuan |
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| Institution: | WU Congfeng 1,2 ZHU Xiaodong 1 WU Shuai 1 ZHAN Rujuan 1 |
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| Abstract: | The design and experimental investigation of a new type plasma source produced by electromagnetic surface waves is given.The experimental results show that the source has successfully produced a homogeneous plasma column in diameter over 160mm with electron density of 10 10 -10 11 cm -3 and electron temperature of several eV at a pressure below 230Pa.This manifests that the source is adaptable applications for large area and large volume plasmas. |
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| Keywords: | Electron temperature Electromagnetic surface wave Plasma source |
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