大功率RF 离子源阻抗匹配电路的设计与实现

在大功率RF 离子源中，激励器的作用是产生等离子体，阻抗匹配电路是激励器吸收RF 功率的关键。将激励器等效阻抗视为一个电阻和一个电感的串联，采用了一种由一个RF 变压器并和两个可调电容组成的阻抗匹配电路，给出了视RF 变压器为理想变压器时阻抗匹配电路的分析模型，推导了阻抗匹配时两个可调电容的电气参数。当激励器实验装置使用一个石英玻璃激励器时，搭建了一个阻抗匹配电路，成功地将RF 功率耦合进激励器并产生了等离子体。

Design and implementation of the matching unit for a high-power RF based ion source

For a RF ion source test facility, the driver is used to produce plasma, and the matching unit is the key for the driver to absorb RF power. The driver’s impedance could be equivalent to a resistance and an inductance in series. A matching unit which consisted of an RF transformer and two variable capacitances was chosen, it was analyzed by an ideal transformer model and its electrical parameters were derived under the condition of matching. When a quartz glass driver was mounted onto the test facility at HUST, a matching unit was implemented, it transmitted RF power into the driver and then plasma was successfully produced.