| װ�����ں濾������Թ�ŵ���ϴ�����о� |
| |
| 引用本文： | 王志文,韦卫星,赵元庆,何燕和,廖义奎.װ�����ں濾������Թ�ŵ���ϴ�����о�[J].核聚变与等离子体物理,2007,27(1):77-80. |
| |
| 作者姓名： | 王志文 韦卫星 赵元庆 何燕和 廖义奎 |
| |
| 作者单位： | (?????????????????????????????? 530006) |
| |
| 摘 要： | 建立了烘烤出气和辉光放电清洗(GDC)出气的物理模型,研究了装置器壁的烘烤出气和辉光放电清洗出气特点.烘烤出气是体出气,出气过程满足扩散方程;GDC出气是溅射脱附过程,它主要是器壁表面的溅射诱导出气.由此分析了HL-1M装置的烘烤出气和辉光放电清洗出气特点,得出了一些经验公式.
|
| 关 键 词： | 出气 扩散 辉光放电 装置 器壁 烘烤 辉光放电清洗 研究 chamber vacuum wall conditioning during glow discharge baking 经验公式 分析 壁表面 脱附过程 扩散方程 物理模型 |
| 文章编号： | 0254-6086（2007）01-0077-04 |
| 修稿时间： | 2006-03-232006-10-13 |
Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber |
| |
| WANG Zhi-wen,WEI Wei-xing,ZHAO Yuan-qing,HE Yan-he,LIAO Yi-kui.Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber[J].Nuclear Fusion and Plasma Physics,2007,27(1):77-80. |
| |
| Authors: | WANG Zhi-wen WEI Wei-xing ZHAO Yuan-qing HE Yan-he LIAO Yi-kui |
| |
| Institution: | (Guangxi University for Nationalities, Nanning 530006) |
| |
| Abstract: | The model of out-gassing by baking and glow discharge cleaning(GDC) is set up.The properties of them are studied.Out-gassing by baking is from bulk and it obeys the diffusion equation.Out-gassing of glow discharge cleaning is mainly on surface,it is inducement out-gassing by sputtering.Thus the properties of out-gassing for baking and GDC on the HL-1M tokamak are analyzed.Some empirical formulas are given. |
| |
| Keywords: | Out-gassing Diffusion Glow discharge cleaning |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《核聚变与等离子体物理》浏览原始摘要信息 |
| 点击此处可从《核聚变与等离子体物理》下载免费的PDF全文 |
