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| 引用本文： | 王照奎,林揆训,娄艳辉,林璇英,祝祖送.SiCl4���������е����Ի������ײ���[J].核聚变与等离子体物理,2006,26(3):252-256. |
| 作者姓名： | 王照奎 林揆训 娄艳辉 林璇英 祝祖送 |
| 作者单位： | 1. 河南师范大学物理系,新乡,453007;汕头大学物理系,汕头,515063 2. 汕头大学物理系,汕头,515063 3. 河南师范大学物理系,新乡,453007 |
| 摘 要： | 设计了一个取样位置能在射频辉光放电等离子体电极间自由移动的取样装置,用质谱计测量了SiCl4等离子体的离子信号。提出了一种线性拟合的方法用于计算SiCl4等离子体的消耗率,利用测量的离子信号,计算出了SiCl4等离子体中SiCln(n=0~2)中性基团的空间分布。实验结果表明,可移动质谱取样装置的设计是合理的;用线性拟合方法得到的等离子体消耗率和中性基团的相对密度,比以前的方法得到的更精确。 |
| 关 键 词： | 射频辉光放电 中性基团 质谱测量 可移动取样装置 |
| 文章编号： | 0254-6086（2006）02-0252-05 |
| 收稿时间： | 2005-11-02 |
| 修稿时间： | 2005-11-022006-02-14 |
Mass spectrometric measurements of SiCln(n=0～2) spatial distribution in SiCl4 plasma |
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| WANG Zhao-kui,LIN Kui-xun,LOU Yan-hui,LIN Xuan-ying,ZHU Zu-song.Mass spectrometric measurements of SiCln(n=0～2) spatial distribution in SiCl4 plasma[J].Nuclear Fusion and Plasma Physics,2006,26(3):252-256. | |
| Authors: | WANG Zhao-kui LIN Kui-xun LOU Yan-hui LIN Xuan-ying ZHU Zu-song |
| Institution: | ??1. Department of Physics??Henan Normal University??Xinxiang 453007?? 2. Department of Physics??Shantou University??Shantou 515063) |
| Abstract: | A movable gas sampling apparatus located in a rf glow discharge chamber is connected to a mass spectrometer for measuring the spatial distribution of neutral radical in SiCl4 plasma. A straight-line fit method is used to obtain the plasma depletion fraction, which is a key parameter for deducing the neutral radical density from the mass spectroscopic signals. The experimental results demonstrate that the proposed straight-line fit method is more accurate for deducing the plasma depletion fraction than the previous one, and the movable gas sampling apparatus is suitable for measuring the neutral radicals spatial distribution. |
| Keywords: | RF glow discharge Neutral radicals Mass spectrometric measurements Moveable mass spectrometric sampling apparatus |
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