| 氢离子轰击对TiC膜结构及界面影响的研究 |
| |
| 引用本文： | 姚伟国,刘玲,戚震中,余增亮,须平,高志崎,何建军.氢离子轰击对TiC膜结构及界面影响的研究[J].核聚变与等离子体物理,1987(3). |
| |
| 作者姓名： | 姚伟国 刘玲 戚震中 余增亮 须平 高志崎 何建军 |
| |
| 作者单位： | 中国科学院固体物理研究所，中国科学院固体物理研究所，中国科学院固体物理研究所，中国科学院等离子体物理研究所，中国科学院等离子体物理研究所，中国科学院等离子体物理研究所，中国科学院等离子体物理研究所 安徽 合肥，安徽 合肥，安徽 合肥，安徽 合肥，安徽 合肥，安徽 合肥，安徽 合肥 |
| |
| 摘 要： | 本文研究荷能氢离子轰击对TiC薄膜的结构及其界面的影响。氢离子源为5A的脉冲离子注入器,能量25keV,脉冲宽度20ms。样品经轰击后发现。与受相同辐照的45~#钢样品相比,TiC薄膜表面无明显的损伤;TiC薄膜内的氢含量较高;薄膜的织构消除;TiC薄膜与基体间的结合力有明显提高。
|
| 关 键 词： | 氢轰击TiC膜 结构 界面 |
A STUDY OF THE EFFECTS OF HYDROGEN ION BOMBARDMENT ON THE STRUCTURE AND INTERFACE OF TiC FILMS |
| |
| YAO Weiguo LIU Ling QI Zhenzhong.A STUDY OF THE EFFECTS OF HYDROGEN ION BOMBARDMENT ON THE STRUCTURE AND INTERFACE OF TiC FILMS[J].Nuclear Fusion and Plasma Physics,1987(3). |
| |
| Authors: | YAO Weiguo LIU Ling QI Zhenzhong |
| |
| Abstract: | The effects of hydrogen ion bombardment on TiC films coated on steel surface were studied. The hydrogen ion beam was supplied by a 5A pulse ion, source with ion energy of 25 keV and pulse duration of 20 ms. After hydrogen ion bombardment, it is found that (1) no obvious damage is observed, on, the surface of the TiC films; (2) the hydrogen content in the TiC film is higher than that in a sample of substrate without coating;(3) the texture which has been built up during previous sputtering process disappears; (4) adhesion between the film and substrate is enhanced. |
| |
| Keywords: | Hydrogen bombardment Titanium carbide Structure interface |
| 本文献已被 CNKI 等数据库收录！ |
