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引用本文:牟宗信,牟晓东,贾莉,张鹏云,刘升光,董闯.????????????????????????[J].核聚变与等离子体物理,2010,30(2):169-172.
作者姓名:牟宗信  牟晓东  贾莉  张鹏云  刘升光  董闯
作者单位:(??????????????????????????????????????????繤?????????? 116024)
基金项目:国家自然科学基金资助项目 
摘    要:利用朗缪尔探针和快速傅里叶变换研究了非平衡磁控溅射等离子体静电波动的驻波共振频谱特征。频带宽度为0~300kHz,典型放电条件下磁控靶前2cm和10cm两个位置的共振本征频率变化范围分别为10~50kHz和1~10kHz,研究了线圈电流、气压和放电功率等参数对共振本征频率的影响;指出了非平衡磁控溅射中能够导致等离子体静电驻波共振的两种势阱结构,提出驻波共振机制解释特征频率出现的原因,根据声驻波共振机制计算的电子温度数值符合实验的结果。

关 键 词:磁控溅射  等离子体  共振
收稿时间:2009-09-14
修稿时间:2010-02-22

Properties of plasma frequency spectrum of the unbalanced magnetron sputtering
MU Zong-xin,MU Xiao-dong,JIA Li,ZHANG Peng-yun,LIU Sheng-guang,DONG Chuang.Properties of plasma frequency spectrum of the unbalanced magnetron sputtering[J].Nuclear Fusion and Plasma Physics,2010,30(2):169-172.
Authors:MU Zong-xin  MU Xiao-dong  JIA Li  ZHANG Peng-yun  LIU Sheng-guang  DONG Chuang
Institution:(Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic technology, Dalian University of Technology, Dalian, 116024)
Abstract:Langmuir probe and fast Fourier transformation (FFT) were used to study the stand wave resonance frequency spectrum features of the plasma electrostatic oscillation of the unbalanced magnetron sputtering. The width of the frequency band was 0~300kHz. The range of resonance eigenfrequency change of the probes 2cm and 10cm in front of the magnetron sputtering under the typical discharge condition was respectively 10~50kHz and 1~10kHz. The impacts of the coil current, pressure and the discharge power on the resonance eigenfrequency were studied. The two potential trap structures causing the stand wave resonance of the plasma electrostatic oscillation in the unbalanced magnetron sputtering were identified and the stand wave resonance mechanism was proposed to explain the characteristic frequency occurred. The electron temperature calculated by the stand wave resonance mechanism conformed to the experiment results.
Keywords:Magnetron sputtering  Plasma  Resonance
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