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| 引用本文： | 蔡潇,曹曾,黄向玫,许正华,崔成和,高霄雁.�ļ�����������������ϵͳ������[J].核聚变与等离子体物理,2012,32(3):229-234. |
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| 作者姓名： | 蔡潇 曹曾 黄向玫 许正华 崔成和 高霄雁 |
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| 作者单位： | (?????????????о??????? 610041) |
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| 基金项目： | 国家磁约束核聚变能研究专项资助项目 |
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| 摘 要： | 介绍了为开展漏孔检测、氘-氦分辨性能及真空检漏技术等相关实验研究而进行的四极质谱计分析与测量系统的研制,描述了真空室结构、抽气设备的选型、测量仪器的选择及控制保护子系统工作方式。对系统进行了包括极限真空、残余气体质谱分析、漏放气率、质谱计性能等测试,结果表明本系统达到了设计要求。
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| 关 键 词： | 流导 漏放气率 灵敏度 离子流 |
Research and development of gas analysis and testing system of quadrupole mass spectrometer |
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| CAI Xiao
,
CAO Zeng
,
HUANG Xiang-mei
,
XU Zheng-hua
,
CUI Cheng-he
,
GAO Xiao-yan.Research and development of gas analysis and testing system of quadrupole mass spectrometer[J].Nuclear Fusion and Plasma Physics,2012,32(3):229-234. |
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| Authors: | CAI Xiao CAO Zeng HUANG Xiang-mei XU Zheng-hua CUI Cheng-he GAO Xiao-yan |
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| Institution: | (Southwestern Institute of Physics, Chengdu 610041) |
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| Abstract: | The gas analysis and testing system of quadrupole mass spectrometer was designed to research leak calibration,discrimination between helium and deuterium,and leak testing technology.The paper describe the structure of vacuum chamber,selection of pumping equipments,choice of measuring instruments,and working mode of control protection subsystem.The performance experiments of the system,including ultimate vacuum,mass spectrometric analysis of residual gas,leak and outgassing rate,and performance of mass spectrometer,are given.The experimental results show that the gas analysis and testing system satisfies our design requirements. |
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| Keywords: | Flow conductance Leak and outgas rate Sensitivity Ion current |
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