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| 引用本文： | 汪俊,温小琼,尹利勇,王德真.�ڱ������������ʯ��Ĥ���������ױ���[J].核聚变与等离子体物理,2009,29(1):82-86. |
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| 作者姓名： | 汪俊 温小琼 尹利勇 王德真 |
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| 作者单位： | (?????????????????繤????????????????????????????????? 116023) |
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| 摘 要： | 在工作气体采用氩气和甲烷混合气体(4:1)的直流辉光放电中，在工作气压分别为10、20、30和40Pa以及沉积时间分别为10、20和30min下利用等离子体化学气相沉积法在内径10mm长100mm的304不锈钢管内表面制备了类金刚石薄膜，并利用喇曼光谱研究了沉积的工作气压和时间对薄膜微观结构的影响。通过对喇曼谱图进行定量解析发现：随着压强的增加，D峰、G峰位置、两峰峰宽以及其强度比值ID/IG都呈先减小后增大趋势，20Pa时达到最低点；随着沉积时间的增加，D峰、G峰位置向低波数端减小，半峰宽减小；D峰、G峰的强度比ID/IG减小。定量解析的结果表明，随沉积时间的增加，DLC薄膜中的sp3含量会增多，结构会相对更有序，薄膜中石墨团簇的尺寸会更大。
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| 关 键 词： | 直流辉光等离子体 类金刚石膜 喇曼光谱 工作气压 沉积时间 |
| 收稿时间： | 2008-03-07 |
| 修稿时间： | 2008-09-20 |
Characterization of Raman spectroscopy of DLC films deposited on inner surface |
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| WANG Jun,WEN Xiao-qiong,YIN Li-yong,WANG De-zhen.Characterization of Raman spectroscopy of DLC films deposited on inner surface[J].Nuclear Fusion and Plasma Physics,2009,29(1):82-86. |
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| Authors: | WANG Jun WEN Xiao-qiong YIN Li-yong WANG De-zhen |
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| Institution: | (Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024) |
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| Abstract: | Diamond-like carbon(DLC) films deposition on inner surface of a stainless steel tube with 100mm in length and 10mm in inner diameter is carried out in direct current glow discharge plasma of Ar/CH4 mixed gas with a flow ratio of 20% CH4,and the influence of pressure and deposition time on micro-structure of the films is investigated by Raman spectroscopy.It is found that the position of both G and D line,the width(FWHM) of both G and D line and the ID/IG ratio all drop firstly and then rise along with the p... |
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| Keywords: | Direct current glow discharge plasma Diamond-like carbon film Raman spectra Working pressure Deposition time |
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