Epitaxial growth of ferroelectric PLZT thin film and their optical properties |
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| Authors: | M Okuyama T Usuki Y Hamakawa T Nakagawa |
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| Institution: | (1) Faculty of Engineering Science, Osaka University, Toyonaka, Osaka, Japan;(2) Faculty of Engineering, Setsunan University, Neyagawa, Osaka, Japan;(3) Present address: Toyota Central Research & Development, Inc., Nagoya, Japan |
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| Abstract: | A series of experiments for growing epitaxial PLZT thin films has been made with rf sputtering. X-ray and electron diffraction
analyses confirm that the fabricated films grow epitaxially on SrTiO3 and MgO crystals. A good transparency in the region above 0.4 μm to infrared with good ferroelectric properties is obtained.
Propagation loss of He−Ne laser light is less than 6 dB/cm, and the PLZT thin film is a promising candidate for the optical
modulator and other functional elements for integrated optics. |
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| Keywords: | 42 80 78 20 85 60 |
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