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Real-time volumetric growth rate measurements and feedback control of three-dimensional laser chemical vapor deposition
Authors:JL Maxwell  J Pegna  DV Messia
Institution:(1) Institute for Micromanufacturing, Louisiana Tech University, Ruston, La 71270, USA (Fax: +1-318/257-5262, E-mail: maxwell@eng.latech.edu), US;(2) Department of Mechanical Engineering, Concordia University, Montréal, Québec H3G 1M8, Canada (Fax: +1-514/848-3175, E-mail: pegna@me.concordia.ca), CA;(3) Department of Mechanical Engineering, Columbia University, 220 S.W. Mudd, New York, NY 10027-6699 , US
Abstract:Received: 4 June 1997/Accepted: 12 June 1997
Keywords:PACS: 81  15G  81  20  81  60B  81  60D
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