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3-D microstructuring inside photosensitive glass by femtosecond laser excitation
Authors:M Masuda  K Sugioka  Y Cheng  N Aoki  M Kawachi  K Shihoyama  K Toyoda  H Helvajian  K Midorikawa
Institution:(1) RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan, JP;(2) Department of Applied Electronics, Tokyo University of Science, Yamazaki 2641, Noda, Chiba 278-8510, Japan, JP;(3) HOYA CONTINUUM CORPORATION, Hikawacho 3-5-24, Toda, Saitama 335-0027, Japan, JP;(4) Center for Microtechnology, The Aerospace Corporation, Los Angeles, CA 90009-2957, USA, US
Abstract:We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose. Received: 12 August 2002 / Accepted: 13 August 2002 / Published online: 4 December 2002 RID="*" ID="*"Corresponding author. Fax: +81-48/468-4682, E-mail: mmasudaw@postman.riken.go.jp
Keywords:PACS: 42  62  -b  81  05  Kf  82  50  Pt
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