3-D microstructuring inside photosensitive glass by femtosecond laser excitation |
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Authors: | M Masuda K Sugioka Y Cheng N Aoki M Kawachi K Shihoyama K Toyoda H Helvajian K Midorikawa |
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Institution: | (1) RIKEN, The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan, JP;(2) Department of Applied Electronics, Tokyo University of Science, Yamazaki 2641, Noda, Chiba 278-8510, Japan, JP;(3) HOYA CONTINUUM CORPORATION, Hikawacho 3-5-24, Toda, Saitama 335-0027, Japan, JP;(4) Center for Microtechnology, The Aerospace Corporation, Los Angeles, CA 90009-2957, USA, US |
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Abstract: | We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive
glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity
arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are
developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room
temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures
with microcells and hollow microchannels embedded in the glass based on the critical dose.
Received: 12 August 2002 / Accepted: 13 August 2002 / Published online: 4 December 2002
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ID="*"Corresponding author. Fax: +81-48/468-4682, E-mail: mmasudaw@postman.riken.go.jp |
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Keywords: | PACS: 42 62 -b 81 05 Kf 82 50 Pt |
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