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p-Type doping of diamond films with a novel organoboron source |
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| Authors: | X K Zhang J G Guo Y F Yao R Wang G M Chen W K Zhou S Yu |
| Institution: | (1) State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 200050 Shanghai, People's Republic of China;(2) Shanghai Institute of Organic Chemistry, Chinese Academy of Sciences, 200032 Shanghai, People's Republic of China |
| Abstract: | p-Type polycrystalline diamond films were prepared by hot-filament CVD method using a liquid cyclic organic borinate ester as the doping source. The obtained films were identified as diamond films by means of SEM and Raman spectroscopy. The resistivity of the doped films can be adjusted by changing the temperature of the boron source. |
| Keywords: | 68 55 72 80 |
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