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Prevention of micropipes and voids at β-SiC/Si(100) interfaces |
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| Authors: | R Scholz U Gösele F Wischmeyer E Niemann |
| Institution: | (1) Max-Planck-Institut für Mikrostrukturphysik, D-06120 Halle/Saale, Germany (Fax: +49-345/5582-566, E-mail: roscholz@mpi-halle.mpg.de), DE;(2) Daimler-Benz Forschungsinstitut, D-60528 Frankfurt/Main, Germany (Fax: +49-69/6679-322, E-mail: ZF2M053@dbag.fra.daimlerbenz.com), DE |
| Abstract: | Received: 23 April 1997/Accepted: 30 July 1997 |
| Keywords: | PACS: 61 16 68 35 68 55 |
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