| 二元光学进展 |
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| 引用本文： | 黄婉云,范玲.二元光学进展[J].大学物理,1996,15(10):1-6. |
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| 作者姓名： | 黄婉云 范玲 |
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| 作者单位： | 北京师范大学分析测试中心 |
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| 摘 要： | 对二元光学的产生和发展作了简要的介绍，通过说明二元学光元件的设计和制作过程，建立二元光学的基本概念，阐述了二元光学的主要应用。
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| 关 键 词： | 二元光学 衍射光学元件 光刻 |
DEVELOPMENT OF BINARY OPTICS |
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| Huang Wanyun,Fan Ling.DEVELOPMENT OF BINARY OPTICS[J].College Physics,1996,15(10):1-6. |
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| Authors: | Huang Wanyun Fan Ling |
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| Abstract: | The appearance of the idea of binary optics and its development are briefly reviewd.The concept of binary optics is estsblished by illustration of the design and manufacture of binary optial elements. The applications are described as well. |
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| Keywords: | binary optics diffraction optial element photolithgraphy |
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