Deflection of sputtered ions by surface charges |
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| Authors: | J Richards R L Dalglish J C Kelly |
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| Institution: | Materials Irradiation Laboratory , Physics, University of New South Wales , Sydney, 2033, Australia |
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| Abstract: | The trajectories of ions sputtered from an insulating surface carrying a surface charge have been computed. The results show that yields measured in particular directions can be in serious error as the trajectories of low energy sputtered ions depend critically on surface charge and point of origin of the ion. The distorted yield curves for 1.2 eV ions and 10 eV ions leaving a surface with a ten volt surface potential are calculated. |
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