Controlling the infrared optical properties of rf-sputtered NiO films for applications of infrared window |
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| Institution: | 1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea;2. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea;1. Department of Electronics Engineering, Yeungnam University, 280 Daehak-ro, Gyeongsan-si 3854, Gyeongsangbuk-do, Republic of Korea;2. Department of Electrical Engineering, Indian Institute of Technology, Bombay, India;1. Institut des Matériaux Jean Rouxel (IMN), UMR 6502, Université de Nantes, 2 rue de la Houssinière, BP 92208, Nantes 44000, France;2. MOLTECH Anjou, UMR 6200, Université de Nantes, 2 rue de la Houssinière, BP 92208, Nantes 44000, France;3. IRT Jules Verne, Chemin du Chaffault, 44340 Bouguenais, France;1. Institute of Electronics and Photonics, Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia;2. Department of Materials Technology, Technical University of Ilmenau, D-98684 Ilmenau, Germany;1. School of Resources and Civil Engineering, Northeastern University, Shenyang 110819, China;2. School of Chemical Engineering, University of New South Wales, Sydney, NSW 2052, Australia |
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| Abstract: | In this paper, we will focus on an IR transmittance enhancement technique from the window material point of view by using metal oxides, especially nickel oxide (NiO). At first, anti-reflection (AR) coatings were modeled by using the optical properties of NiO films. The transmittance of the model was predicted using Swanepoel’s model and verified with NiO film prepared by rf magnetron sputtering. Also, post-deposition annealing was performed and was found to change the optical properties of the NiO film. Therefore, we analyzed the annealing effect on the IR optical properties of the NiO film. Furthermore, we confirmed the durability of the NiO film and verified the possibility of this material being used in infrared optics. |
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| Keywords: | Nickel oxide Infrared window Anti-reflection coating Annealing |
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