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An electrostatic model of the cutoff probe
Institution:1. Nanotech Optoelectronics Research Center, 261-1 Daeji-ro, Yongin, 16882, Gyeonggi Province, Republic of Korea;2. Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, 99 Daehak-ro, Yuseong-gu, 34134, Daejeon, Republic of Korea;3. Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), 156 Gajeongbuk-Ro, Yuseong-gu, 34103, Daejeon, Republic of Korea;4. Institute of Quantum Systems (IQS), Chungnam National University, 99 Daehak-ro, Yuseong-gu, 34134, Daejeon, Republic of Korea
Abstract:Although a circuit model of the previously developed cutoff probe for plasma diagnostics elucidates the basic physics and contributes to the development of the cutoff probe, a theoretical validation of the circuit model has yet to be accomplished. For theoretical validation, this paper proposes a one-dimensional electrostatic model, or 1dESM, of the cutoff probe, which is based on electrostatic field analysis in a finite two-wire approximation. The transmission spectrum S21 calculated by the 1dESM shows a good agreement with that from a three-dimensional full electromagnetic wave simulation for various electron densities and pressures. Based on the 1dESM, the formation mechanism of the S21 of the cutoff probe was analyzed. Theoretical validation of the circuit model was then achieved by comparing the circuit model with the 1dESM. This paper is believed to contribute to a better understanding of the cutoff probe and to the development of cutoff probe models.
Keywords:Plasma diagnostics  Electron density  Electron density measurement  Cutoff probe  Cutoff probe model  Cutoff probe circuit model  Cutoff probe electrostatic model
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