| Dielectric Properties of Multilayered Ba0.5Sr0.5TiO3 Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering |
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| 作者姓名： | 林明通 陈国荣 杨云霞 肖田 徐毅 楼均辉 陈晨曦 |
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| 作者单位： | [1]Key Laboratory for Superfine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, Shanghai 200237 [2]SVA Electron Co. Ltd., Shanghai 200081 |
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| 摘 要： | A new stacking method via variation ofsubstrate temperature in rfmagnetron sputter is used to fabricate polycrystalline/polycrystalline Ba0.5Sr0.5TiO3 thin films with higher dielectric constant, higher breakdown strength and lower leakage current densities than those prepared by a conventionM deposition method. The improved figure of merit G （ε0εrEb） of the Ba0.5Sr0.5TiO3 thin films implies that they are a feasible insulation layer for thin film electroluminescent devices.
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| 关 键 词： | 非传导性 Ba0.5Sr0.5TiO3 多层薄膜 沉积物 磁电管 电子喷射 |
| 收稿时间： | 2005-08-17 |
| 修稿时间： | 2005-08-17 |
Dielectric Properties of Multilayered Ba0.5Sr0.5TiO3 Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering |
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| LIN Ming-Tong, CHEN Guo-Rong, YANG Yun-Xia, XIAO Tian, XU Yi, LOU Jun-Hui, CHEN Chen-Xi.Dielectric Properties of Multilayered Ba0.5Sr0.5TiO3 Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering[J].Chinese Physics Letters,2005,22(11):2947-2949. |
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| Authors: | LIN Ming-Tong CHEN Guo-Rong YANG Yun-Xia XIAO Tian XU Yi LOU Jun-Hui CHEN Chen-Xi |
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