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Diffraction Properties for 1000 Line/mm Free-Standing Quantum-Dot-Array Diffraction Grating Fabricated by Focused Ion Beam |
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| Institution: | [1]Research Center of Laser Fusion, China Academy of EnKineerinK Physics, Mian.yanK 621900; [2]School of Materials Science and Engineering, Southwest University of Science and Technology Mianyang 621010; [3]3Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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