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High Speed and Ultra-Low-Power Phase Change Line Cell Memory Based on SiSb Thin Films with Nanoscale Gap of Electrodes Less Than 100nm |
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| Authors: | LV Shi-Long SONG Zhi-Tang ZHANG Ting FENG Song-Lin |
| Institution: | Nanotechnology Laboratory, Research Center of Functional Semiconductor Film Engineering and Technology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050Graduate School of the Chinese Academy of Sciences, Beijing 100049 |
| Abstract: | |
| Keywords: | 84 37 +q 85 30 De 85 40 Hp |
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