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Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film |
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| Authors: | LIU Hong-Mei ZHAO Quan-Liang CAO Mao-Sheng YUAN Jie DUAN Zhong-Xia QIU Cheng-Jun |
| Institution: | School of Materials Science and Chemistry, Harbin Engineering University, Harbin 150001School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081Key Laboratory of Integrated Circuit, Heilongjiang University, Harbin 150080School of Information Engineering, Central University for Nationalities, Beijing 100081 |
| Abstract: | |
| Keywords: | 77 65 Bn 85 50 -n 85 85 +j |
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