| Thermo-optical Switch Matrix Based on Silicon-on-Insulator Waveguides |
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| 作者姓名： | 李艳萍 杨笛 孙飞 陈少武 余金中 |
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| 作者单位： | StateKeyLaboratoryofIntegratedOpto-Electronics,InstituteofSemiconductors,ChineseAcademyofSciences,Beijing100083 |
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| 摘 要： | A thermo-optical waveguide switch matrix is designed and fabricated on silicon-on-insulator wafer. Multi-mode interferometers are used as power splitters and combiners in a Mach-Zehnder structure. Inductively coupled plasma reactive ion etching is used to fabricate the waveguides. The rise and fall times of the switch matrix are 13us and 7us, respectively. Switch cells have an average switching power consumption of 340mW.
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| 关 键 词： | 热-光开关矩阵 硅绝缘体 波导 光学通信 二氧化硅 |
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