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Influence of Mass Transport on Formation of Si—Nanostructures
引用本文:张晓娜,李超荣,等.Influence of Mass Transport on Formation of Si—Nanostructures[J].中国物理快报,2003,20(1):111-113.
作者姓名:张晓娜  李超荣
作者单位:[1]BeijingLaboratoryofElectronMicroscopy,InstituteofPhysiccs,ChineseAcademyofSciences,POBox603,Beijing100080 [2]BeijingLaboratoryofElectronMicroscopy,InstituteofPhysiccs,ChineseAcademyofSciences,POBox603,Be
摘    要:Nanowire-like,condyloid-like and flakes of Si-nanostructures were synthesized by thermal evaporation under different mass transport conditions by changing the ambient pressure.The structural analysis shows that a higher mass transport rate is not favourite for the formation of fine single crytalline nanowires when the substrate placed closely to the thermal vapour source,The higher mass transport rate can induce a lower Si partial pressure near the source and hence results in a lower supersaturation near the substrate.Experimental results reveal that the formation of Si-nanowires is not controlled by mass transport but by surface process.The driving force on the surface in the key factor for the formation of well-crystallized nanowires.

关 键 词:硅纳米结构  质量输运  化学蒸发沉积
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